bulk micromachining

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• Bulk micromachining — is a process used to produce micromachinery or microelectromechanical systems (MEMS).Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively… …   Wikipedia

• Micromachining — may refer to: Superfinishing, a metalworking process for producing very fine surface finishes Various microelectromechanical systems Bulk micromachining Surface micromachining High aspect ratio microstructure technologies See also High aspect… …   Wikipedia

• Surface micromachining — is a process used to produce micromachinery or MEMS.Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively etched to produce structures, surface micromachining is based on the deposition and etching of different structural… …   Wikipedia

• Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia

• Micromachinery — micromachines redirects here. For the toys, see Micro Machines. For the video games based on the toys, see Micro Machines (video games). A micromachine by Sandia is moved by a lit LED at Miraikan in Tokyo …   Wikipedia

• Microtechnology — is technology with features near one micrometre (one millionth of a metre, or 10−6 metre, or 1μm). In the 1960s, scientists learned that by arraying large numbers of microscopic transistors on a single chip, microelectronic circuits could be… …   Wikipedia

• 3D microfabrication — relates to the engineering of bulk solids on the micrometre or submicrometre scale. Although the term nanofabrication might be considered for the submicrometre scale, it is not in common use, and tends to relate to a bottom up approach (while… …   Wikipedia

• Microfluidics — deals with the behavior, precise control and manipulation of fluids that are geometrically constrained to a small, typically sub millimeter, scale. Typically, micro means one of the following features: small volumes (nl, pl, fl) small size low… …   Wikipedia

• Comb drive — Comb drives capacitive actuators, often used linear actuators that utilize electrostatic forces that act between two electrically conductive combs. Comb drive actuators typically operate at the micro or nanometer scale and are generally… …   Wikipedia

• Microfabricación — Este artículo o sección sobre tecnología necesita ser wikificado con un formato acorde a las convenciones de estilo. Por favor, edítalo para que las cumpla. Mientras tanto, no elimines este aviso puesto el 4 de junio de 2007. También puedes… …   Wikipedia Español

• Silicon nitride — Preferred IUPAC name Silicon nitride …   Wikipedia